Density variation of tungsten films sputtered over topography

Journal of Applied Physics

Volumn 70, Issue 8, 1991, Pages 4295-4300

  Tait, R N ^a   Dew, S K ^a   Smy, T ^b   Brett, M J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004266474     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.349107     Document Type: Article

References (17)