Electronic structure of the nanoscale Al/SiO2/Si system

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 1, 1997, Pages 21-24

  Zavodinsky, V G ^a   Kuyanov, I A ^b  

^a INSTITUTE OF BIOLOGY AND SOIL SCIENCE   (Russian Federation)

^b FAR EASTERN FEDERAL UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0004187388     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589248     Document Type: Article

References (17)

1. M. Komiyama, M. Kirino, and H. Kurokawa, Jpn. J. Appl. Phys. 132, 2934 (1993).
2. Y. Tao, Z. H. Lu, M. J. Graham, and S. P. Tay, J. Vac. Sci. Technol. B 12, 2500 (1994).
3. T. Morimoto, H. S. Momose, M. Tsuchiaki, Y. Ozawa, K. Yamada, and H. Iwai, Extended Abstracts 1991 International Conference Solid State Devices and Materials, Yokohama, 1991 (Business Center for Academic Societies, Tokyo, 1991), p. 23.
4. MOS Integrated Circuits, edited by W. M. Penney (Van Nostrand Reinhold, New York, 1972).
5. G. L. Gutsev, V. K. Gryaznov, and V. A. Nasluzov, Chem. Phys. 154, 291 (1991).
6. L. Hedin and B. I. Lundquist, J. Phys. C 4, 2064 (1971).
7. A. Redondo, W. A. Goddard III, T. C. Swartz, and T. C. McGill, J. Vac. Sci. Technol. 19, 498 (1981).
8. 2 and Its Interfaces, edited by S. T. Pantelides (Pergamon, New York, 1978), p. 60.
9. R. J. Bell and P. Dean, Philos. Mag. 25, 1381 (1972).
10. R. A. Barrio, F. L. Galeener, E. Matinez, and R. J. Elliott, Phys. Rev. B 48, 15672 (1993).
11. F. L. Galeener, J. Non-Cryst. Solids 49, 53 (1982).
12. J. P. Rino, I. Ebbsjö, R. K. Kalia, A. Nakano, and P. Vashishta, Phys. Rev. B 47, 3053 (1993).
13. F. J. Grunthaner, P. J. Grunthaner, R. P. Vasquez, B. F. Lewis, J. Maserjian, and A. Madhukar, Phys. Rev. Lett. 43, 1683 (1979).
14. F. Gel'mukhanov and H. Ågren. Phys. Rev. B 50, 11, 121 (1994).
15. V. G. Zavodinsky and I. A. Kuyanov, Phys. Low-Dim. Structures 1/2, 61 (1996).
16. V. G. Zavodinsky and I. A. Kuyanov, Surf. Rev. Lett. (to be published).
17. S. A. Nelson, H. D. Hallen, and R. A. Buhrman, J. Appl. Phys. 63, 5027 (1988).