Modeling of light scattering by submicrometer spherical particles on silicon and oxidized silicon surfaces

Optical Engineering

Volumn 35, Issue 3, 1996, Pages 858-869

  Liswith, Mitchell L ^a,b   Bawolek, Edward J ^b   Hirleman, Edwin Dan ^a,c  

^a Arizona State University   (United States)

^b INTEL CORPORATION   (United States)

^c SPIE ^*

Author keywords

Angle resolved; Light scatter; Modeling; Submicrometer polystyrene latex spheres

Indexed keywords

EID: 0004183772     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600664     Document Type: Article

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