Thermally stable amorphous BaxTi2−xOy thin films

Applied Physics Letters

Volumn 66, Issue 7, 1995, Pages 809-811

  Liu, W at ^a   Lakshmikumar, S T ^b   Knorr, D B ^a   Rymaszewski, E J ^a   Ta, T am ^a   Bakhru, H ^c  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b NATIONAL PHYSICAL LABORATORY   (India)

^c STATE UNIVERSITY OF NEW YORK   (United States)

Author keywords

AMORPHOUS STATE; ANNEALING; BARIUM TITANATES; CRYSTALLIZATION; DEPOSITION; FILM GROWTH; INTERFACE STRUCTURE; STOICHIOMETRY; SURFACE REACTIONS; THERMAL INSTABILITIES

Indexed keywords

EID: 0004079393     PISSN: 00036951     EISSN: 10773118     Source Type: Journal    
DOI: 10.1063/1.113428     Document Type: Article

References (23)

1. L. H. Parker and A. F. Tasch, IEEE Cir. Device Mag. 6, 17 (1990).
2. W.-T. Liu, S. Cochrane, S. T. Lakshmikumar, D. B. Knorr, E. J. Rymas-zewski, J. M. Borrego, and T.-M. Lu, IEEE Electron Device Lett. 14, 320 (1993).
3. H. Ohshime and S. Morozumi, IEDM Tech. Dig. 157 (1989).
4. K. Iijima, T. Terashima, K. Yamamoto, K. Hirata, and Y. Bando, Appl. Phys. Lett. 56, 527 (1990).
5. K. Sreenivas, A. Mansingh, and M. Sayer, J. Appl. Phys. 62, 4475 (1987).
6. G. M. Davis and M. C. Glower, Appl. Phys. Lett. 55, 113 (1989).
7. M. N. Kamalasanan, S. Chandra, P. C. Joshi, and A. Mansingh, Appl. Phys. Lett. 59, 3547 (1991).
8. L. A. Willis, B. W. Wessels, D. S. Richeson, and T. J. Marks, Appl. Phys. Lett. 60, 6 (1992).
9. P. Li and T.-M. Lu, Appl. Phys. Lett. 57, 2336 (1990).
10. P. Li, T.-M. Lu, and H. Bakhru, Appl. Phys. Lett. 58, 2639 (1991).
11. W. T. Liu, S. T. Lakshmikumar, D. B. Knorr, T. M. Lu, and Ir. G. A. van der Leeden, Appl. Phys. Lett. 63, 574 (1993).
12. K. Fukushima, I. Yamada, and T. Takagi, J. Appl. Phys. 58, 4146 (1985).
13. M. Wohlecke, V. Marello, and A. Onton, J. Appl. Phys. 48, 1748 (1977).
14. P. Li and T.-M. Lu, J. Appl. Phys. 71, 5596 (1992).
15. P. Li and T.-M. Lu, Appl. Phys. Lett. 59, 1064 (1991).
16. J. P. Phillips, J. Non-Cryst. Solids 34, 153 (1979); 43, 37 (1981); 44, 17 (1981).
17. A. Onton and V. Marelle, Structure and Excitation of Amorphous Solids, AIP Conf. Proc. 31, 320 (1976).
18. J. Zarzycki, Basic Features of the Glassy State, edited by J. Calmerero and A. Alegeria (World Scientific, Singapore, 1990), pp. 3–28.
19. H. S. Chen, Rep. Prog. Phys. 39, 353 (1980).
20. K. Shoji and Y. Uehara, Jpn. J. Appl. Phys. 24, 36 (1985).
21. J. J. Ritter, R. S. Roth, and J. E. Blendell, J. Am. Ceram. Soc. 69, 155 (1986).
22. E. A. Porakoshitis, Glass Science and Technology, edited by D. R. Uhlmann and N. J. Kreidel (Academic, New York, 1990), Vol. 4a, pp. 1–31.
23. E. A. Porakoshitis, J. Non-Cryst. Solids 28, 86 (1977).