Metrology source for high-resolution heterodyne interferometer laser gauges

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3350, Issue , 1998, Pages 973-984

  Dubovitsky, Serge ^a   Seidel, David J ^a   Liu, Duncan T ^a   Gutierrez, Roman C ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Heterodyne interferometry; Optical metrology; Space based metrology systems

Indexed keywords

ASTROPHYSICS; HETERODYNING; INTERFEROMETERS; INTERFEROMETRY; LIGHT MEASUREMENT; THICKNESS MEASUREMENT;

DISPLACEMENT MEASUREMENTS; FREQUENCY MODULATORS; FREQUENCY SHIFTERS; FREQUENCY STABILIZATION; HETERODYNE INTERFEROMETRY; OPTICAL METROLOGY; POLARIZATION MAINTAINING; RELATIVE DISPLACEMENTS; SPACE-BASED METROLOGY SYSTEMS;

MEASUREMENTS;

EID: 0003818675     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.317166     Document Type: Conference Paper

References (11)

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