Advantages of scanned-beam MOEMS approach to microdisplay and related applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4178, Issue , 2000, Pages 158-164

  McIntyre, Todd R ^a   Osborn, Thor D ^a   Andrei, Radu G ^b  

^a MICROVISION INC   (United States)

^b Display Industry Consultant   (United States)

Author keywords

Imaging; Manufacturing; Microdisplay; Miems; Moems; Scanned beam; Scanner; Testing

Indexed keywords

DISPLAY DEVICES; MANUFACTURE; SCANNING;

BEAM APPROACH; DISPLAY INDUSTRY; HIGH-PRECISION; IMAGING APPLICATIONS; MATRIX DISPLAY; MICRODISPLAYS; RETINAL-SCANNING DISPLAY; SILICON PROCESSING;

MOEMS;

EID: 0003814795     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.396484     Document Type: Conference Paper

References (4)

1. H. Urey, D.W. Wine, T.D. Osbom, "Optical Performance Requirements for MEMS-Scanner Based Microdisplays, " Conf On MOEMS and Miniaturized Systems, Proc. SPIE Vol. 4178, Santa Clara, California (2000).
2. D.W. Wine, M.P. Helsel, L. Jenkins, H. Urey, T.D. Osborn, "Performance of a Biaxial MEMS-Based Scanner for Microdisplay Applications, " Confi On MOEMS and Miniaturized Systems, Proc. SPIE Vol. 4178, Santa Clara, California (2000).
3. C. Chinnock, Liquid Crystal on Silicon (LCOS) Technology Report, Insight Media, Norwalk, 1999.
4. R. Grace, "The New MEMS and Their Killer Apps, " Sensors, Vol. 17, No. 7, July 2000, pg. 8.