Surface topology of GaAs(100) after focused ion beam implantation of Si++

Applied Physics Letters

Volumn 70, Issue 10, 1997, Pages 1305-1307

  Schmuki, P ^a,b   Erickson, L E ^a   Champion, G ^a   Mason, B F ^a   Fraser, J ^a   Moessner, C ^a,c  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b ETH ZURICH   (Switzerland)

^c EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003636219     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118519     Document Type: Article

References (11)

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