Mechanical properties of TiN-TiC mixed crystal films

Journal of Physics Condensed Matter

Volumn 10, Issue 1, 1998, Pages 111-121

  Hyakutake, H ^a   Imada, Y ^a   Honda, F ^a   Nakajima, K ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003486714     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/10/1/013     Document Type: Article

References (16)

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3. Imada Y, Honda F and Nakajima K 1990 Characterization of heterogeneous substances by EPMA X-ray Anal. 21 111-21 (in Japanese)
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11. Thornton J A 1977 High rate thick film growth Ann. Rev. Mater. Sci. 7 239-60
12. Uchiyama Y, Hasaka M, Mori H and Matsutake H 1991 Orientation of TiN and TiC films coated by the PDV method Surf. Technol. 42 1250-4 (in Japanese)
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