Effect of dissolved oxygen on thermal oxidation in Ta2O5/Ta sandwiches

Journal of Electronic Materials

Volumn 27, Issue 9, 1998, Pages 1034-1037

  Pozdeev Freeman, Yu ^a   Glabkikh, A ^b   Karpovski, M ^b   Palevski, A ^b  

^a Vishay   (United States)

^b TEL AVIV UNIVERSITY   (Israel)

Author keywords

Anodic oxide; Tantalum capacitors; Thermal oxidation

Indexed keywords

EID: 0003307548     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-998-0159-3     Document Type: Article

References (6)

1. Yu. Pozdeev-Freeman, Proc. CARTS 97: 17th Capacitor And Resistor Technology Symposium, March 1997, Florida, p. 161.
2. Yu. Pozdeev-Freeman, Yu. Rozenberg, A. Gladkikh, M. Karpovski and A. Palevski, J. Mater. Sci.: Mater. Electron., accepted.
3. L. Young, Anodic Oxide Films, (New York: Academic Press, 1961).
4. J. Gilber and H. Oechsner, Thin Solid Films 131, 5686 (1985).
5. Random Fluctuations and Pattern Growth: Experiments and Models, ed. H.E. Stanley and N. Ostrowsky, (Dordrecht/ Boston/London: Kluwer Academic Publishers, 1988).
6. D.M. Smith and T.B. Tripp, J. Electrochem. Soc. 110, 1277 (1963).