High Rate Deposition of Iron Films by Sputtering from Two Facing Targets

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 16, Issue 9, 1977, Pages 1715-1716

  Hoshi, Youichi ^a   Naoe, Masahiko ^a   Yamanaka, Shun ichi ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003170494     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.16.1715     Document Type: Article

References (2)

1. N. Hosokawa and M. Nakatukasa: Shinku (J. Vac. Soc. Japan) 16 (1973) 327 [in Japanese].
2. T. Tsukada and N. Hosokawa: Paper of Technical Group on Component Parts and Materials CPM–76–59 (1976).