GaN thin films deposited by pulsed laser ablation in nitrogen and ammonia reactive atmospheres

Materials Science and Engineering B

Volumn 50, Issue 1-3, 1997, Pages 20-24

  Cole, D ^a   Lunney, J G ^a  

^a TRINITY COLLEGE DUBLIN   (Ireland)

Author keywords

Gallium nitride; Photoluminescence; Pulsed laser deposition; Thin films

Indexed keywords

AMMONIA; CRYSTAL ORIENTATION; ELECTRIC CONDUCTIVITY OF SOLIDS; ENERGY GAP; LASER ABLATION; LASER PULSES; NITROGEN; PHOTOLUMINESCENCE; SEMICONDUCTING GALLIUM COMPOUNDS; SUBSTRATES; THIN FILMS;

PULSED LASER DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0003139863     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(97)00202-X     Document Type: Article

References (27)

1. S.N. Mohammad, A.A. Salvador, H. Morkoc, Proc. IEEE 83 (1995) 10.
2. D.B. Eason, Z. Yu, W.C. Hughes, C. Boney, J.W. Cook Jr., J.F. Schetzina, D.R. Black, G. Cantwell, W.C. Harsch, J. Vac. Sci. Technol. B13 (1995) 4.
3. S. Nakamura, M. Senoh, N. Iwasa, S. Nagahama, Appl. Phys. Lett. 67 (13) (1995) 1868.
4. S. Nakamura, T. Mukai, M. Senoh, Appl. Phys. Lett. 64 (1994) 1687.
5. J.W. Yang, Q. Chen, C.J. Sun, B. Lim, M.Z. Anwar, M. Asif Khan, H. Temkin, Appl. Phys. Lett. 69 (3) (1996) 369.
6. S. Nakamura, M. Senoh, S. Nagahama, T. Tamada, T. Matsushita, H. Kiyoka, Y. Sugimoto, Jpn. J. Appl. Phys. 35 (1996) L74.
7. M. Asif Khan, C.J. Sun, J.W. Yang, Q. Chen, B.W. Lim, M. Zubair Anwar, A. Osinsky, H. Temkin, Appl. Phys. Lett. 69 (1996) 16.
8. T. Lei, M. Fanciulli, R.J. Molnar, T.D. Moustakas, R.J. Granham, J. Scanlon, Appl. Phys. Lett. 59 (8) (1991) 944.
9. C.G. Van de Walle, Wide-band-gap Semiconductors, North-Holland, Amsterdam, 1992.
10. D. Cole, J.G. Lunney, F.P. Logue, J.F. Donegan, J.M.D. Coey, Mater. Sci. Eng. B 48 (1997) 239-243.
11. R.F. Xiao, H.B. Liao, N. Cue, X.W. Sun, H.S. Kwok, J. Appl. Phys., 80 (7) (1996) 4226-4228.
12. D.B. Chrisey, G.K. Hubler, Pulsed Laser Deposition of Thin Films, Wiley, New York, 1994.
13. J.J. Dubowski, D.F. Williams, P.B. Sewell, P. Norman, Appl. Phys. Lett. 46 (11) (1985) 1081.
14. J.T. Cheung, G. Niizawa, J. Moyle, N.P. Ong, B.M. Paine, T. Vreeland Jr., J. Vac. Sci. Technol. A4 (4) (1986) 2086.
15. J.J. Dubowski, J. Cryst. Growth 101 (1990) 105.
16. J.J. Dubowski, A.P. Roth, Z.R. Wasilewski, S.J. Rolfe, Appl. Phys. Lett. 59 (13) (1991) 1591.
17. H.J. Masterson, J.G. Lunney, Appl. Surf. Sci. 86 (1994) 154.
18. R.D. Vispute, H. Wu, J. Narayan, Appl. Phys. Lett. 67 (11) (1995) 1549.
19. C.M. Rouleau, D.H. Lowndes, J.W. McCamy, J.D. Budai, D.B. Poker, D.B. Geohegan, A.A. Puretzky, S. Zhu, Appl. Phys. Lett. 67 (17) (1995) 2545.
20. R. Jordan, M. McConnell, J.G. Lunney, Supercond. Sci. Technol. 8 (1995) 504.
21. I. Martil, G. Gonzalez Diaz, Am. J. Phys. 60 (1) (1992) 83.
22. Shu-Chung Chiao, B.G. Bovard, H.A. Macleod, Appl. Opt. 34 (31) (1995) 7355.
23. D.B. Geohegan, in: J.C. Miller, R.f. Haglund (Eds.), Laser Ablation: Mechanisms and Applications, Springer-Verlag, Heidelberg, 1991.
24. Y.B. Zeldovich, Y.P. Raizer, in: Physics of Shock Waves and High Temperature Hydrodynamic Phenomena, Academic Press, New York, 1, 1996, p. 94.
25. E. van de Riet, J.C.S. Kools, J. Dieleman, J. Appl. Phys. 73 (1993) 8290.
26. J.V. Armstrong, T. Farrell, T.B. Joyce, P. Kightley, T.J. Bullough, P.J. Goodhew, J. Cryst. Growth. 120 (1992) 84.
27. R.D. Vispute, V. Talyansky, R.P. Sharma, S. Choopun, M. Downes, K.A. Jones, A.A. Lliadis, M. Asif Khan, J.W. Yang, Appl. Phys. Lett. 71 (1) (1997) 102.