A novel electro-optical probe to diagnose plasma uniformity

Review of Scientific Instruments

Volumn 69, Issue 9, 1998, Pages 3176-3180

  Sarfaty, M ^a   Harper, M ^a   Hershkowitz, N ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003102970     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1149080     Document Type: Article

References (14)

1. F. F. Chen, in Plasma Diagnostic Techniques, edited by R. H. Huddlestone and S. L. Leonard (Academic, New York, 1965), pp. 113-200.
2. L. Schott, in Plasma Diagnostics, edited by W. Lochte-Holtgreven (North-Holland, Amsterdam, 1968), pp. 668-731.
3. I. H. Hutchinson, Principles of Plasma Diagnostics (Cambridge University Press, New York, 1987).
4. K.-S. Chung and I. H. Hutchinson, Phys. Rev. A 38, 4721 (1988).
5. J. W. Coburn and M. Chen, J. Appl. Phys. 51, 3134 (1980).
6. R. d'Agostino, F. Cramarossa, S. DeBenedictus, and G. Ferraro, J. Appl. Phys. 52, 1259 (1981).
7. V. M. Donnelly, D. L. Flamm, W. C. Dautremont-Smith, and D. Werder, J. Appl. Phys. 55, 242 (1984).
8. R. A. Gottscho and V. M. Donnelly, J. Appl. Phys. 56, 245 (1984).
9. A. D. Richards, B. E. Thompson, K. D. Allen, and H. H. Sawin, J. Appl. Phys. 62, 792 (1987).
10. C. Lai, B. Brunmeier, and R. C. Woods, J. Vac. Sci. Technol. A 13, 2086 (1995).
11. P. V. Fel'tsan and I. P. Zapesochnyi, Ukr. Phys. J. 13, 143 (1968).
12. I. P. Zapesochnyi and P. V. Fel'tsan, Opt. Spectra 20, 521 (1966).
13. Y. Ralchenko (private communication).
14. M. V. Malyshev and V. M. Donnelly, J. Vac. Sci. Technol. A 15, 550 (1997).