Outdiffusion of impurity atoms from silicon crystals and its dependence upon the annealing atmosphere

Applied Physics Letters

Volumn 68, Issue 9, 1996, Pages 1229-1231

  Zhong, Lei ^a   Kirino, Yoshio ^a   Matsushita, Yoshiaki ^a   Aiba, Yoshiro ^a   Hayashi, Kenro ^a   Takeda, Ryuji ^a   Shirai, Hiroshi ^a   Saito, Hiroyoki ^a   Matsushita, Junichi ^a   Yoshikawa, Jun ^a  

^a Nissei Bldg   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003082396     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115935     Document Type: Article

References (17)

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