Use of atomic force microscopy for analysis of high performance InGaAsP/InP semiconductor lasers with dry-etched facets

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1007-1011

  Whaley, R D ^a   Gopalan, B ^a   Dagenais, M ^a   Gomez, R D ^b   Johnson, F G ^b   Agarwala, S ^b   King, O ^b   Stone, D R ^b  

^a UNIVERSITY OF MARYLAND   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003061412     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590059     Document Type: Article

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