Evolution of the electron-energy-distribution function during rf discharge transition to the high-voltage mode

Physical Review Letters

Volumn 68, Issue 1, 1992, Pages 40-43

  Godyak, V A ^a   Piejak, R B ^a   Alexandrovich, B M ^a  

^a VERIZON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003009453     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevLett.68.40     Document Type: Article

References (9)

1. Ion Bombardment Secondaty Electron Maintenance of Steady RF Discharge
2. The influence of the electron transport cross sectional shape on electron energy distribution functions in DC and microwave plasmas