SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Physics Letters

Volumn 59, Issue 11, 1991, Pages 1353-1355

In situ spectroscopic ellipsometry study of the electron cyclotron resonance plasma oxidation of silicon and interfacial damage

(3) Hu, Y Z a Joseph, J a Irene, E A a

a UNIVERSITY OF NORTH CAROLINA (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002993543 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.105306 Document Type: Article

Times cited : (43)

References (22)

1
- 0011077393
- (1965) J. Appl. Phys. , vol.36 , pp. 2703
- Ligenza, J.R.¹

2
- 84919065390
- (1980) Jpn. J. Appl. Phys. , vol.19 , pp. 103
- Ho, V.Q.¹ Sugano, T.²

3
- 84951209983
- (1980) Appl. Phys. Lett. , vol.36 , pp. 399
- Chang, R.P.H.¹ Chang, C.C.² Darack, S.³

4
- 0019636412
- (1981) J. Electrochem. Soc. , vol.128 , pp. 2466
- Ray, A.K.¹ Reisman, A.²

5
- 0345525032
- (1986) J. Appl. Phys. , vol.60 , pp. 3136
- Batey, J.¹ Tierney, E.²

6
- 84957272341
- (1987) J. Vac. Sci. Technol. A , vol.5 , pp. 2231
- Lucovsky, G.¹ Tsu, D.V.²

7
- 84955022077
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 576
- Fountain, G.G.¹ Hattangady, S.V.² Rudder, R.A.³ Marcunas, R.J.⁴ Lucovsky, G.⁵ Kim, S.S.⁶ Tsu, D.V.⁷

8
- 0000756997
- (1989) J. Vac. Sci. Technol. B , vol.7 , pp. 861
- Lucovsky, G.¹ Kim, S.S.² Tsu, D.V.³ Fountain, G.G.⁴ Marcunas, R.J.⁵

9
- 0014800514
- (1970) RCA Rev. , vol.31 , pp. 187
- Kern, W.¹ Puotinen, D.A.²

10
- 84913425659
- (1990) SPIE Proc. , vol.1118 , pp. 162
- Andrews, J.W.¹ Hu, Y.Z.² Irene, E.A.³

11
- 0344596653
- (1991) Appl. Phys. Lett. , vol.58 , pp. 589
- Hu, Y.Z.¹ Conrad, K.A.² Li, M.³ Andrews, J.⁴ Simko, J.⁵ Irene, E.A.⁶

12
- 84951222756
- Ph.D. Thesis, University of North Carolina, Chapel Hill, NC
- (1990)
- Andres, J.W.¹

13
- 35949035159
- (1979) Phys. Rev. B , vol.20 , pp. 3292
- Aspnes, D.E.¹ Theeten, J.B.²

14
- 0019058474
- (1980) J. Vac. Sci. Technol. , vol.17 , pp. 1057
- Aspnes, D.E.¹

15
- 0018986239
- (1981) J. Vac. Sci. Technol. , vol.18 , pp. 289
- Aspnes, D.E.¹

16
- 36549102218
- (1985) Appl. Phys. Lett. , vol.47 , pp. 339
- Vedam, K.¹ McMarr, P.J.² Narayan, J.³

17
- 0021517196
- (1984) J. Appl. Phys. , vol.56 , pp. 2716
- Perriere, J.¹ Siejka, J.² Chang, R.P.H.³

18
- 36149022787
- (1962) Phys. Rev. , vol.128 , pp. 219
- Chanin, L.M.¹ Phelps, A.V.² Biondi, M.A.³

19
- 0020205589
- (1982) J. Electrochem. Soc. , vol.129 , pp. 2594
- Irene, E.A.¹ Tierney, E.² Angillelo, J.³

20
- 0001077490
- (1988) CRC Crit. Rev. Solid State Mater. Sci. , vol.14 , pp. 175
- Irene, E.A.¹

21
- 24644490777
- (Elsevier, North Holland, Amsterdam).
- (1987) Chemical and Electronic Structure of the [Formula Omitted] Interface
- Grunthaner, F.J.¹ Grunthaner, P.J.²

22
- 56249140748
- (1980) J. Electrochem. Soc. , vol.127 , pp. 1359
- Aspnes, D.E.¹ Theeten, J.B.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.