Reactive ion etching of polymer films in an oxygen inductively coupled radiofrequency-discharge plasma

High Energy Chemistry

Volumn 33, Issue 2, 1999, Pages 119-123

  Amirov, I I ^a   Izyumov, M O ^a  

^a RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002949013     PISSN: 00181439     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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