Applications of total reflection X-ray fluorescence spectrometry in trace element and surface analysis

Fresenius' Journal of Analytical Chemistry

Volumn 365, Issue 1-3, 1999, Pages 19-27

  Schwenke, H ^a   Beaven, P A ^a   Knoth, J ^a  

^a INSTITUTE OF MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002938775     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002160051439     Document Type: Article

References (18)

1. Prange A, Kramer K, Reus U (1991) Spectrochim Acta 46B: 1385-1393
2. Prange A, Knöchel A, Michaelis W (1985) Anal Chim Acta 172:79-100
3. Bohlen A von, Eller R, Klockenkämper R, Tölg G (1987) Anal Chem 59:2551-2555
4. Koopmann C, Prange A (1991) Spectrochim Acta 46B:1395-1402
5. Wittershagen A, Rostam-Khani P, Zickermann V, Zickermann I, Gemeinhardt S, Ludwig B, Kolbesen BO (1998) Fresenius J Anal Chem 361:326-328
6. Eichinger P, Rath H J, Schwenke H (1988) ASTM Spec Tech Publ 990:305-313
7. Streckfuß N, Frey L, Zielonka G, Kroninger F, Ryzlewicz C, Ryssel H (1992) Fresenius J Anal Chem 343:765-768
8. ASTM F 1526-94 (1994) Standard Test Method for Measuring Surface Metal Contamination on Silicon Wafers by Total Reflection X-Ray Fluorescence Spectroscopy, Philadelphia, P:A: American Society for Testing Materials
9. Bedzyk M J, Bommarito G M, Schildkraut J S (1989) Phys Rev Let 62:1376-1379
10. Boer DKG de (1991) Phys Rev 44 B:498-511
11. Weisbrod U, Gutschke R, Knoth J, Schwenke H (1991) Appl Phys A53:449-456
12. Schwenke H, Knoth J (1995) Analytical Science 11:533-537
13. Bertin E P (1975) Principles and Practice of X-Ray Spectrometric Analysis. Plenum Press, New York
14. Knoth J, Prange A, Schneider H, Schwenke H (1997) Spectrochim Acta Part B 52:907-913
15. Stoev K, Knoth J, Schwenke H (1998) X-Ray Spectrometry 27:166-172
16. Yoneda Y, Horiuchi T (1971) Rev Sci Instrum 42:1069-1070
17. Günther R, Wiener G, Knoth J, Schwenke H, Bormann R (1996) Rev Sci Instrum 67:2332-2336
18. Schwenke H, Knoth J, Fabry L, Pahlke S, Scholz R, Frey L (1997) J Electrochem Soc 44 :3979-3983