High-Level CAD Melds Micromachined Devices with Foundries

IEEE Circuits and Devices Magazine

Volumn 8, Issue 6, 1992, Pages 10-17

  Marshall, Janet C ^a   Parameswaran, M ^b   Zaghloul, Mona E ^c   Gaitan, Michael ^d  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b SIMON FRASER UNIVERSITY   (Canada)

^c GEORGE WASHINGTON UNIVERSITY   (United States)

^d Semiconductor Electronics Division of NIST ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002847793     PISSN: 87553996     EISSN: None     Source Type: Journal    
DOI: 10.1109/101.167507     Document Type: Article

References (17)

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