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Volumn 148, Issue 4, 2001, Pages

Thermodynamic Stability of RuO2Bottom Electrodes and Their Effect on the Ba-Sr-Ti Oxide Film Quality

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EID: 0002847789     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1355689     Document Type: Article
Times cited : (15)

References (19)
  • 15
    • 0010168642 scopus 로고
    • Oak Ridge National Laboratory Report No. ORNL/TM-5775, Union Carbide Corp., Oak Ridge, TN
    • T. M. Besmann, SOLGASMIX-PV, Oak Ridge National Laboratory Report No. ORNL/TM-5775, Union Carbide Corp., Oak Ridge, TN (1977).
    • (1977) SOLGASMIX-PV
    • Besmann, T.M.1
  • 16
    • 0442327679 scopus 로고
    • JANAF Thermochemical Tables, J. Phys. Chem. Ref. Data, 7, 851 (1978).
    • (1978) J. Phys. Chem. Ref. Data , vol.7 , pp. 851
  • 17
    • 84951378314 scopus 로고
    • JANAF Thermochemical Tables, J. Phys. Chem. Ref. Data, 11, 695 (1982).
    • (1982) J. Phys. Chem. Ref. Data , vol.11 , pp. 695


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.