Thin film growth and surface modification by keV ion beam

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 12 B, 1998, Pages 6984-6990

  Choi, Sung Chang ^a   Park, Yong Wook ^a   Choi, Won Kook ^a   Kim, Ki Hwan ^a   Cho, Jun Sik ^a   Han, Sung ^a   Cho, Jung ^a   Jung, Sun ^b   Han, Young Gun ^a   Yoo, Byong Kook ^c   Jung, Hyung Jin ^a   Koh, Seok Keun ^a  

^a Korea Institute of Science and Technology   (South Korea)

^b PLATECH   (South Korea)

^c IBTECH   (South Korea)

Author keywords

Ion beam modification; Ion beam sputter deposition; Polymethylmethacrylate; Wettability; ZnO thin film

Indexed keywords

EID: 0002820783     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.6984     Document Type: Article

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