INA-X: An advanced instrument for electron-Gas SNMS

Mikrochimica Acta

Volumn 133, Issue 1-4, 2000, Pages 69-73

  Oechsner, Hans ^a   Bock, Wolfgang ^a   Kopnarski, Michael ^a   Müller, Mathias ^a  

^a France   (Germany)

Author keywords

Instrumental development; Secondary neutral mass spectrometry; Surface analysis

Indexed keywords

EID: 0002799701     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/s006040070074     Document Type: Article

References (5)

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3. H. Oechsner, Plasma Phys. 1974, 16, 835.
4. G. K. Wehner, D. Rosenberg, J. Appl. Phys. 1960, 31, 177.
5. W. Bieck, H. Gnaser, H. Oechsner, J. Vac. Sci. Technol. 1994, A12, 4894.