XRD-Studies of SiC/Si Layers on Carbon Substrates

Mikrochimica Acta

Volumn 125, Issue 1, 1997, Pages 325-330

  Treffer, Gerd ^a   Neuhäuser, Jens ^a   Marx, Günter ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

CVD; Hard coatings; Silicides; Silicon; Silicon carbide; XRD

Indexed keywords

EID: 0002763908     PISSN: 00263672     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf01246206     Document Type: Article

References (3)

1. S. Motojima, M. Hasegawa, Thin Solid Films 1990, 186, L39.
2. B. J. Aylett, Br. Polymer J. 1986, 18, 359.
3. J. Neuhäuser, H. Plänitz, W. Wagner, Fresenius J. Anal Chem. 1994, 349, 162.