Photon enhanced oxidation of silicon

Applied Physics Letters

Volumn 42, Issue 1, 1983, Pages 63-65

  Young, Edwin M ^a   Tiller, William A ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002750831     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.93726     Document Type: Article

References (3)