Point-to-point control of a MIMO servomechanism

Proceedings of the American Control Conference

Volumn 5, Issue , 1998, Pages 2648-2651

  De Roover, Dick ^a   Sperling, Frank B ^b   Bosgra, Okko H ^c  

^a SC Solutions Inc   (United States)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMMAND SHAPING; FREE MOTION; HIGH-PRECISION; MULTIPLE INPUTS AND OUTPUTS; POINT TO POINT CONTROL; POINT-TO-POINT MOTION; RESIDUAL VIBRATIONS;

LINEAR MOTORS;

VIBRATIONS (MECHANICAL);

EID: 0002631078     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.1998.688329     Document Type: Conference Paper

References (6)

1. Bhat, S.P. and D.K. Miu, (1990). "Precise Point-to-Point Positioning Control of Flexible Structures,", Trans. ASME J. Dynamic Systems, Measurement, and Control Vol. 112, pp. 667-674.
2. Meckl, P.H. and W.P. Seering, (1985). "Minimizing Residual Vibrations for Point-to-Point Motion,", Trans. ASME J. vibration, Acoustics, Stress and Reliability in Design, Vol. 107, pp. 378-382.
3. Roover, D. de and F.B. Sperling (1997). "Point-to-point Control of a High Accuracy Positioning Mechanism,", Proc. 1997American Control Confi, Albuquerque, NM, pp. 1350-1354.
4. Roover, D. de (1997). Motion Control of a Wafer Stage - A Design Approach for Speeding Up IC Production. Ph.D. Thesis, Mech. Eng. Systems and Control Group, Delft University of Technology, Delft, The Netherlands.
5. Singer, N.C. and W.P. Seering, (1990). "Preshaping Command Inputs to Reduce System Vibration,", Trans. ASME J. Dynamic Systems, Measurement, and Control, Vol. 115, pp. 76-82.
6. Tuttle, T.D. and W.P. Seering (1997). "Deriving and Verifying Time-Optimal Commands for Linear Systems,", Proc. 1997 American Control Conf, Albuquerque, NM, pp. 1325-1329.