Correlating discrete orientation and grain size to the sputter deposition properties of tantalum

Journal of Electronic Materials

Volumn 31, Issue 1, 2002, Pages 2-9

  Michaluk, Christopher A ^a  

^a Cabot Performance Materials   (United States)

Author keywords

Electron backscatter diffraction; Grain size; Sputtering; Tantalum; Texture

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; GRAIN SIZE AND SHAPE; MICROSTRUCTURE; SPUTTER DEPOSITION; THIN FILMS;

CRYSTALLOGRAPHIC TEXTURE; ELECTRON BACKSCATTER DIFFRACTION; WROUGHT TANTALUM;

TANTALUM COMPOUNDS;

EID: 0002510330     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-002-0165-9     Document Type: Article

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