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Volumn 52, Issue 1, 1998, Pages 55-58

Optical effects of α-SiCx:H films synthesized by reactive ion beam deposition

Author keywords

Infrared reflection spectra; Reactive ion beam deposition; Silicon carbide

Indexed keywords

DEPOSITION; INFRARED RADIATION; ION BEAMS; LATTICE VIBRATIONS; LIGHT REFLECTION; REFRACTIVE INDEX; SILICON CARBIDE; SYNTHESIS (CHEMICAL);

INFRARED REFLECTION SPECTRA; REACTIVE ION BEAM DEPOSITION;

AMORPHOUS FILMS;

EID: 0002480554 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(97)00141-4 Document Type: Article

Times cited : (7)

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