Stress-induced oxygen precipitation in Cz-Si

Materials Science and Engineering B

Volumn 36, Issue 1-3, 1996, Pages 30-32

  Misiuk, A ^a   Surma, B ^a   Hartwig, J ^b  

^a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

Author keywords

Defect formation; High pressure; Oxygen precipitation; Silicon

Indexed keywords

EID: 0002460003     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5107(95)01282-6     Document Type: Article

References (10)

1. R. Nagai, E. Takeda, Y. Tabuki, L. Wei and S. Tanigawa, Mater. Res. Soc. Symp. Proc., Materials Research Society 1992, 262 (1992) 283.
2. M. Reiche and W. Nitzsche, Mater. Res. Soc. Symp. Proc., Materials Research Society 1992, 262 (1992) 621.
3. Z. Weng-Sieh, P. Krulevitch, R. Gronsky and G.C. Johnson, J. Mater. Res., 9 (1994) 2057.
4. A. Misiuk, L.I. Datsenko, B. Surma and V.P. Popov, in C. Hill and P. Ashburn (eds.), Proc. ESSDERC'94, Editions Frontiers, 1994, p. 243.
5. A. Misiuk, J. Adamczewska, J. Bak-Misiuk and J. Wolf, Solid State Phenomena, 32-33 (1993) 167.
6. L.I. Datsenko, A. Misiuk, J. Hartwig, A. Briginets and V.I. Khrupa, Acta Phys. Polon. A, 86 (1994) 585.
7. J. Vanhellemont and C. Claeys, J. Appl. Phys., 62 (1987) 3960; J. Appl. Phys., 71 (1992) 1073.
8. J. Vanhellemont and C. Claeys, J. Appl. Phys., 62 (1987) 3960; J. Appl. Phys., 71 (1992) 1073.
9. A. Ikari, K. Kawakami, H. Haga, A. Uedono, L. Wei, T. Kawano and S. Tanigawa, Mater. Sci. Forum, 143-147 (1994) 1583.
10. A. Misiuk, J. Vanhellemont, C. Claeys, J. Hartwig, E. Prieur, L.I. Datsenko, V.I. Khrupa, L.I. Fedina, A.V. Antonova and J. Bak-Misiuk, Proc. XVI Conf. Applied Crystallography, Cieszyn, Poland 1994, in press.