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Volumn 83, Issue 1, 1998, Pages 100-107

Diffusional creep as a stress relaxation mechanism in electromigration

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EID: 0002434403     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.366729     Document Type: Article
Times cited : (20)

References (49)
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  • 25
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    • In Russian
    • E. E. Glickman, N. A. Osipov, and E. M. Ivanov, Defect Diffus. Forum 66-69, 1128 (1989); Microelectronics 19, 132 (1990) (In Russian); in Materials for Computers, edited by Ch. V. Kopetsky (Znanie, Moscow, 1987), p. 35 (in Russian).
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    • E. E. Glickman, N. A. Osipov, and E. M. Ivanov, Defect Diffus. Forum 66-69, 1128 (1989); Microelectronics 19, 132 (1990) (In Russian); in Materials for Computers, edited by Ch. V. Kopetsky (Znanie, Moscow, 1987), p. 35 (in Russian).
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  • 33
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    • note
    • x, θ=1. The formation of discrete hillocks is then visualized as a homogeneous thickening of the film which is constant in the transverse y-direction but decreases with x, while the total increase in thickness corresponds to the total volume of real hillocks. In terms of the continuity arguments outlined, this is quite a reasonable simplification. The implications of θ<1 may however be important in terms of creep viscosity estimations.
  • 34
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    • note
    • If hillocks cannot form, steady-state EM displacements will not take place, either due to an EM stress induced failure or to the balance between the EM flux and the bock-diffusion flux driven by the established elastic stress gradient.
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  • 43
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    • note
    • x (caused by the inhomogeneous hillock distribution ignored in Refs. 23 and 24 and in the present article), hardly justifies using anything more sophisticated than the simple Eq. (3) for treatment of the data in Fig. 5(c).
  • 49
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.