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Volumn 69, Issue 1, 1998, Pages 91-94
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Optimized compact secondary electron collector with 100% collection efficiency for focused ion beam systems
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0002425098
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1148483 Document Type: Article |
Times cited : (5)
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References (5)
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