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Volumn 69, Issue 1, 1998, Pages 91-94

Optimized compact secondary electron collector with 100% collection efficiency for focused ion beam systems

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0002425098     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1148483     Document Type: Article
Times cited : (5)

References (5)
  • 3
    • 85034287393 scopus 로고    scopus 로고
    • From Munro's Electron Beam Software. Ltd.
    • From Munro's Electron Beam Software. Ltd.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.