SCOPUS 정보 검색 플랫폼

Chemical Vapor Deposition

Volumn 2, Issue 3, 1996, Pages 85-96

Metal Chalcogenide Materials: Chalcogenolato Complexes as "Single-Source" Precursors

(1) Bochmann, Manfred a,b

a UNIVERSITY OF EAST ANGLIA (United Kingdom)

b UNIVERSITY OF LEEDS (United Kingdom)

Author keywords

Film deposition; Metal chalcogenides; MOCVD; Semiconductors; Single source precursor

Indexed keywords

EID: 0002344343 PISSN: 09481907 EISSN: None Source Type: Journal
DOI: 10.1002/cvde.19960020302 Document Type: Article

Times cited : (199)

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