Effects of substrate refrigeration on plasma polymerization with fluorocarbons

Journal of Photopolymer Science and Technology

Volumn 12, Issue 1, 1999, Pages 45-52

  Yoshimura, Kikuko ^a   Minaguchi, Takeshi ^a   Nakano, Hirohiko ^a   Tatsuta, Toshiaki ^a   Tsuji, Osamu ^a   Toyozawa, Keiko ^b   Abe, Takeshi ^b   Ogumi, Zempachi ^b  

^a 33 Tanakamiya cho Takeda F   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

Fluorocarbons; Plasma multi phase polymerization; Plasma polymerization with a refrigerated substrate

Indexed keywords

EID: 0002309330     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.12.45     Document Type: Article

References (5)

1. Japan Society for the Promotion of Science, Committee 153 (Plasma Materials Science), Ed, Handbook of Plasma Materials Science, Ohm-sha Co., Tokyo (1992) pp.576-579, pp.620-631.
2. K. Yasuda, Y. Uchimoto, Z. Ogumi, and Z. Takehara, J. Electrochem. Soc., 141 (1994) 2350.
3. N. Inagaki, S. Tasaka, and T. Kurita, Potym. Bull., 22 (1989) 15.
4. N. Inagaki, S. Tasaka, and Y. Horikawa, J. Polym. Sci., Polym. Chem. Ed., 27 (1989) 3495.
5. S. Kurosawa, N. Kamo, T. Arimura, A. Sekiya, Y. Horikawa, T. Kurita, S. Tasaka, and N. Inagaki, J. Jpn. Oil Chem. Soc., 43 (1994) 1007.