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Plasma Chemistry and Plasma Processing

Volumn 1, Issue 1, 1981, Pages 37-52

Mechanisms of radical production in CF3Cl, CF3Br, and related plasma etching gases: The role of added oxidants

(1) Flamm, Daniel L a

a LUCENT TECHNOLOGIES (United States)

Author keywords

formation of etchants; Plasma etching; polymers

Indexed keywords

EID: 0002306486 PISSN: 02724324 EISSN: 15728986 Source Type: Journal
DOI: 10.1007/BF00566374 Document Type: Article

Times cited : (59)

References (17)

1
- 0018455110
- (1979) Solid State Technol. , vol.22 , Issue.4 , pp. 109
- Flamm, D.L.¹

2
- 0018441483
- (1979) J. Vac. Sci. Technol. , vol.16 , pp. 391
- Coburn, J.W.¹ Winters, H.F.²

3
- 0019016751
- (1980) J. Vac. Sci. Technol. , vol.17 , pp. 721
- Mogab, C.J.¹ Levinstein, H.J.²

4
- 84933955961
- D. L. Flamm and D. Butherus, in preparation (1981)

5
- 27544434986
- (1980) J. Appl. Phys. , vol.51 , pp. 5688
- Flamm, D.L.¹

6
- 0019079341
- (1980) J. Vac. Sci. Technol. , vol.17 , pp. 1341
- Flamm, D.L.¹ Golovchenko, J.A.² Cowan, P.L.³

7
- 0018541406
- (1979) J. Appl. Phys. , vol.50 , pp. 6594
- Truesdale, E.A.¹ Smolinsky, G.²

8
- 0005647194
- (1950) Trans. Faraday Soc. , vol.46 , pp. 803
- Laird, R.K.¹ Andrews, E.E.² Barrow, R.F.³

9
- 0037575925
- (1969) Adv. Photochem. , vol.7 , pp. 57
- Heicklen, J.¹

10
- 0018500871
- (1979) J. Appl. Phys. , vol.50 , pp. 4982
- Smolinsky, G.¹ Flamm, D.L.²

11
- 0017994895
- (1978) J. Appl. Phys. , vol.49 , pp. 3796
- Mogab, C.J.¹ Ada, A.C.² Flamm, D.L.³

12
- 0019009112
- (1980) J. Electrochem. Soc. , vol.127 , pp. 928
- Tokunaga, K.¹ Hess, D.W.²

13
- 33947557606
- (1965) J. Phys. Chem. , vol.59 , pp. 464
- Weisz, P.B.¹

14
- 0019436775
- (1980) J. Appl. Phys. , vol.52 , pp. 162
- d'Agostino, R.¹ Flamm, D.L.²

15
- 84933955960
- C. J. Mogab, unpublished results (1980).

16
- 0015669803
- (1973) J. Appl. Phys. , vol.44 , pp. 3980
- Vriens, L.¹

17
- 0019562973
- (1981) J. Appl. Phys. , vol.52 , pp. 3633
- Flamm, D.L.¹ Donnelly, V.M.² Mucha, J.A.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.