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Volumn 42, Issue 3, 1999, Pages 49-54
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Curbing plasma-induced gate oxide damage
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0002299845
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
Times cited : (6)
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References (8)
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