LITHOGRAPHY WITH THE SCANNING TUNNELING MICROSCOPE.

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 4, Issue 1, 1986, Pages 86-88

  McCord, M A ^a   Pease, R F W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS - APPLICATIONS; GOLD AND ALLOYS - ETCHING; INTEGRATED CIRCUITS, VLSI - FABRICATION; MICROSCOPES, ELECTRON - FIELD EMISSION; SPUTTERING - APPLICATIONS;

LANGMUIR-BLODGETT RESIST FILM; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPE; SPUTTER ETCHING;

LITHOGRAPHY;

EID: 0002252024     PISSN: 0734211X     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.583400     Document Type: Article

References (9)