Solving the integration challenges of low-k dielectries

Semiconductor International

Volumn 22, Issue 13, 1999, Pages 56-64

  Peters, Laura ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002190771     PISSN: 01633767     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (2)

1. L. Peters, "Pursuing the Perfect Lo\v-k Dielectric," Semiconductor International, Sept. 1998, p. 64.
2. Alderborn, Pharmaceutical Powder Compaction, 1996, p. 306.