Investigation of ultra thin SiNxOy layers produced by low-energy ion implantation with NRA and channeling-RBS

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 108, Issue 1-2, 1996, Pages 62-64

  Michelmann, R W ^a   Baumann, H ^a   Markwitz, A ^a   Meyer, J D ^a   Bethge, K ^a  

^a GOETHE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002086648     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01047-5     Document Type: Article

References (12)

1. A. Markwitz, M. Bachmann, H. Baumann, E.F. Krimmel, P. Misaelides and K. Bethge, Nucl. Instr. and Meth. B 68 (1992) 218.
2. K.J. Reeson, P.L.F. Hemment, J.A. Kilner, R.J. Chater, C.D. Meeksion, C. Marsh, G.R. Booker and J.R. Davis, Vacuum 36 (1986) 891.
3. C. Maurer, R. Kallweit, H. Baumann, E.F. Krimmel and K. Bethge, Nucl. Instr. and Meth. B 80/81 (1993) 564.
4. G. Battistig, G. Amsel and E. d'Artemare, Nucl. Instr. and Meth. B 66 (1992) 1.
5. A. Markwitz, H. Baumann, E.F. Krimmel, M. Rose, K. Bethge, S. Logotheditis and P. Misaelides, Vacuum 44 (1993) 367.
6. W. Theodossiu, H. Baumann, A. Markwitz and K. Bethge, Fresenius J. Anal. Chem., in press.
7. K.M. Horn and W.A. Landford, Nucl. Instr. and Meth. B 29 (1988) 609.
8. K. Bethge, A. Mader and J.D. Meyer, Nucl. Instr. and Meth. B 56/57 (1991) 806.
9. L. Feldman, J.W. Mayer and S.T. Picraux, Materials Analysis by Ion Channeling (Academic Press, New York, 1982).
10. W.K. Chu, J.W. Mayer and M.A. Nicolet, Backscattering Spectrometry (Academic Press, Orlando, 1978).
11. J.F. Ziegler, J.P. Biersack, U. Littmark, The Stopping and Ranges of Ions in Solids (Pergamon Press, New York, 1985).
12. J.D. Meyer, R.W. Michelmann, F. Ditroi and K. Bethge, Nucl. Instr. and Meth. B 89 (1994) 186.