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Volumn 286, Issue 1, 1996, Pages 75-82
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Modeling of evaporation rates of cerium β-diketonate
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Author keywords
Cerium diketonate; Evaporation rate; Modeling; Solid precursor
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Indexed keywords
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EID: 0002085410
PISSN: 00406031
EISSN: None
Source Type: Journal
DOI: 10.1016/0040-6031(96)02945-0 Document Type: Article |
Times cited : (10)
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References (14)
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