New positive resists with cycloaliphatic structures in the main chain

European Polymer Journal

Volumn 35, Issue 1, 1999, Pages 69-76

  Meyer, Ursula ^a   Kern, Wolfgang ^a   Hummel, Klaus ^a   Stelzer, Franz ^a  

^a GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002049569     PISSN: 00143057     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0014-3057(98)00094-9     Document Type: Article

References (14)

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