Reliability of laser activated metal fuses in DRAMs

Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium

Volumn , Issue , 1999, Pages 389-394

  Arndt, K ^a   Narayan, C ^a   Brintzinger, A ^a   Guthrie, W ^a   Lachtrupp, D ^a   Mauger, J ^a   Glimmer, D ^a   Lawn, S ^a   Dinkel, B ^a   Mitwalsky, A ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC RANDOM ACCESS STORAGE; INTEGRATED CIRCUIT MANUFACTURE; LASER APPLICATIONS; METALS; RELIABILITY; REPAIR;

LASER ACTIVATED METAL FUSES;

ELECTRONICS PACKAGING;

EID: 0001914470     PISSN: 10898190     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)