Preparation of thin films of YBa2Cu3Ox with a smooth surface by atomic layer MOCVD

Materials Science and Engineering B

Volumn 41, Issue 1, 1996, Pages 87-92

  Yamamoto, Shuu'ichirou ^a   Kawaguchi, Atsushi ^a   Oda, Shunri ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Atomic force microscope; Boulder formation; Dislocations; Metalorganic chemical vapor deposition; YBa2Cu3Ox

Indexed keywords

ATOMIC FORCE MICROSCOPY; EXPERIMENTS; HIGH TEMPERATURE SUPERCONDUCTORS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; SURFACE PROPERTIES;

BOULDER FORMATION; SMOOTH SURFACE;

THIN FILMS;

EID: 0001892610     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01630-3     Document Type: Article

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