Atomic absorption spectroscopic measurements of silicon atom concentrations in electron cyclotron resonance silicon oxide deposition plasmas

Journal of Applied Physics

Volumn 85, Issue 1, 1999, Pages 87-93

  Augustyniak, Edward ^a   Chew, Kok Heng ^a   Shohet, J Leon ^a   Woods, R Claude ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001879968     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369424     Document Type: Article

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