Processing and performance of integrated ferroelectric and CMOS test structures for memory applications

Integrated Ferroelectrics

Volumn 6, Issue 1-4, 1995, Pages 93-109

  Dormans, G J M ^a   Larsen, P K ^a   Spierings, G A C M ^a   Dikken, J ^a   Ulenaers, M J E ^a   Cuppens, R ^a   Taylor, D J ^a   Verhaar, R D J ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001824526     PISSN: 10584587     EISSN: 16078489     Source Type: Journal    
DOI: 10.1080/10584589508019356     Document Type: Article

References (11)

1. See e. g.: Nonvolatile semiconductor memories, technologies, design and applications. Ed. C. Hu (IEEE press. New York) 1991.
2. J. F. Scott and C. A. Araujo, Science. 246. 1400 (1989).
3. P. K. Larsen, G. A. C. M. Spierings, R. Cuppens and G. J. M. Dormans, Microelectr. Engin., 22, 53 (1993).
4. P. K. Larsen, G. L. M. Kampschöer, M. B. van der Mark and M. Klee, Proc. 8th Int. Symp. Appl. Ferroelectrics, Greenville. SC (1992) IEEE 92CH3080-9, p. 217.
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6. G. A. C. M. Spielings, J. B. A. van Zon, M. Klee and P. K. Larsen, Integr. Ferroelectrics, 3, 283 (1993).
7. M. Klee. R. Eusemann. R. Waser and W. Brand, J. Appl. Phys., 72. 1566 (1992).
8. M. de Keijser, P. J. van Veldhoven and G. J. M. Dormans, Mat. Res. Soc. Symp. Proc., 310. 223 (1993).
9. J. J. van Glabbeek, G. A. C. M. Spierings, M. J. E. Ulenaers, G. J. M. Dormans and P. K. Larsen. Mat. Res. Soc. Symp. Proc., 310. 127 (1993).
10. I. K. Naik, L. E. Sanchez, S. Y. Wu and B. P. Maderic, Integr. Ferroelectrics, 2, 133 (1992).
11. P. K. Larsen, G. J. M. Dormans, D. Taylor and P. J. van Veldhoven, submitted to J. Appl. Phys.