Reactive-sputtering of titanium oxide thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 712-715

  Guerin, D ^a   Ismat Shah, S ^b  

^a UNIVERSITY OF DELAWARE   (United States)

^b DUPONT COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001767933     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580807     Document Type: Article

References (11)

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