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Applied Physics Letters
Volumn 63, Issue 21, 1993, Pages 2938-2940
SiGe gate oxide prepared at low-temperatures in an electron cyclotron resonance plasma
(2)
Li, P W
a
Yang, E S
a
a
Och Spine at New York Presbyterian Hospitals
(
United States
)
Author keywords
[No Author keywords available]
Indexed keywords
EID
:
0001760861
PISSN
:
00036951
EISSN
:
None
Source Type
:
Journal
DOI
:
10.1063/1.110790
Document Type
:
Article
Times cited : (
37
)
References (
17
)
1
0023595886
(1987)
Proceedings of the IEEE 1987 Bipolar Circuits and Technology Meeting
, pp. 57-64
Smith, C.
1
Welbourn, A.D.
2
2
3843064419
(1972)
J. Cryst. Growth
, vol.17
, pp. 288
Margalit, S.
1
Bar-Lev, A.
2
Kuper, A.B.
3
Aharnoi, H.
4
Neugroschel, A.
5
3
0000428302
(1988)
Mater. Res. Soc. Symp. Proc
, vol.102
, pp. 295
Patton, G.L.
1
Iyer, S.S.
2
Delage, S.L.
3
Ganin, E.
4
McIntosh, R.C.
5
4
0012264612
(1989)
Appl. Phys. Lett
, vol.54
, pp. 644
LeGoues, F.K.
1
Rosenberg, R.
2
Meyerson, B.S.
3
5
0013242121
(1989)
J. Appl. Phys
, vol.65
, pp. 1724
LeGoues, F.K.
1
Rosenberg, R.
2
Nguyen, T.
3
Himpsel, F.
4
Meyerson, B.S.
5
6
0001946668
(1990)
Appl. Phys. Lett
, vol.56
, pp. 66
Nayak, D.
1
Kamjoo, K.
2
Woo, J.C.S.
3
Park, J.S.
4
Wang, K.L.
5
7
0000973048
(1990)
Appl. Phys. Lett
, vol.57
, pp. 369
Nayak, D.
1
Kamjoo, K.
2
Woo, J.C.S.
3
Park, J.S.
4
Wang, K.L.
5
8
36449005261
(1991)
Appl. Phys. Lett
, vol.59
, pp. 1200
Liou, H.K.
1
Mei, P.
2
Gennser, U.
3
Yang, E.S.
4
9
0002721119
(1991)
Appl. Phys. Lett
, vol.59
, pp. 78
Eugene, J.
1
Legoues, F.K.
2
Kesan, V.P.
3
Iyer, S.S.
4
d’Heurle, F.M.
5
10
0026743471
(1992)
IEEE Trans. Electron Devices
, vol.ED-39
, pp. 56
Nayak, D.K.
1
Kamjo, K.
2
Park, J.S.
3
Woo, J.C.S.
4
Wang, K.L.
5
11
0001455819
(1991)
J. Appl. Phys
, vol.70
, pp. 5076
Paine, D.C.
1
Caragianis, C.
2
Schwartzman, A.F.
3
12
21544449965
(1991)
Appl. Phys. Lett
, vol.59
, pp. 2031
Vancauwenbweghe, O.
1
Hellman, O.C.
2
Herbots, N.
3
Tan, W.J.
4
13
0026156656
(1991)
IEEE Electron Device Lett
, vol.12
, pp. 246
Iyer, S.S.
1
Solomon, P.M.
2
Kesan, V.P.
3
Bright, A.A.
4
Freeouf, J.L.
5
Nguyen, T.N.
6
Warren, A.C.
7
14
10044245522
(1991)
J. Appl. Phys
, vol.70
, pp. 3301
Carl, D.A.
1
Hess, D.W.
2
Lieberman, M.A.
3
Nguyen, T.D.
4
Gronsky, R.
5
15
36449000640
(1992)
Appl. Phys. Letts
, vol.60
, pp. 3265
Li, P.W.
1
Liou, H.K.
2
Yang, E.S.
3
Iyer, S.S.
4
Smith, T.P.
5
Lu, Z.
6
16
84950554172
(1991)
Mater. Res. Soc. Symp. Proc
, vol.102
, pp. 295
Aldrich, D.B.
1
Cho, J.
2
Schneider, T.P.
3
Hamphreys, T.P.
4
Nemanich, R.J.
5
17
0004277486
(Wiley, New York)
(1982)
MOS Physics and Technology
Nicollian, E.H.
1
Brews, J.R.
2
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