New diffractive beam shaper generated with the aid of e-beam lithography

Optical Engineering

Volumn 35, Issue 5, 1996, Pages 1400-1406

  Golub, Mikhail A ^a,b   Duparré, Michael ^a  

^a FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^b Holo Or Ltd   (Israel)

Author keywords

Beam shapers; Binary optics; Computer generated holograms; Diffractive optics; Electron beam lithograph; Measurements of intensity patterns

Indexed keywords

EID: 0001759563     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600697     Document Type: Article

References (3)

1. W. B. Veldkamp, "Laser beam profile shaping with interlaced binary diffraction gratings," Appl. Opt. 21, 3209-3212 (1982).
2. J. Cordingley, "Application of a binary diffractive optic for beam shaping in semiconductor processing by lasers," Appl. Opt. 32, 2538-2542 (1994).
3. M. A. Golub, S. V. Karpeev, A. M. Prokhorov, I. N. Sisakyan, and V. A. Soifer, "Focusing light into a specified volume by computer synthesized holograms," Sov. Tech. Phys. Lett. 7, 264-266 (1981).