The properties of some volatile alkyl (di-alkylamido)zinc(II) and bis(di-alkylamido) zinc compounds : Potential zinc precursors in MOCVD

Polyhedron

Volumn 16, Issue 20, 1997, Pages 3593-3599

  Malik, M Azad ^a   O'Brien, P ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

MOCVD; Vapour pressure; Zincalkylamides

Indexed keywords

EID: 0001739816     PISSN: 02775387     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0277-5387(97)00116-2     Document Type: Article

References (35)

1. Nakanishi, K., Suemune, I., Kuroda, Y. and Yamanishi, M., Appl. Phys. Lett., 1991, 59, 1401.
2. Zmudzinski, C. A., Guan, Y. and Zory, P. S., IEEE Photon Technol. Lett., 1990, 2, 94.
3. Haase, M. A., Qiu, J., DePuydt, J. M., Cheng, H. and Potts, J. E., Appl. Phys. Lett., 1991, 58, 1173.
4. Haase, M. A., DePuydt, J. M., Cheng, H. and Potts, J. E., J. Appl. Phys., 1990, 67, 448.
5. Yasuda, T., Mitsuishi, I. and Kukimoto, H., Appl. Phys. Lett., 1988, 52, 57.
6. Yushikawa, A., Muto, S., Yamaga, S. and Kasi, S., Jpn. J. Appl. Phys., 1988, 27, L260.
7. Yahata, A., Mitsuhashi, H., Hirahara, K. and Beppu, T., Jpn. J. Appl. Phys., 1990, 29, L4.
8. Gunshore, R., Nurmikko, A. and Kobayashi, M., Physics World, March 1992, p. 46.
9. Yodo, T., Ueda, K., Morio, K., Yamashita, K. and Tanaka, S., J. Cryst. Growth, 1991, 107, 659.
10. Yodo, T. and Tanaka, S., J. Cryst. Growth, 1992, 117, 415.
11. Akimoto, K., Miyajima, K. and Mori, Y., Jpn. J. Appl. Phys., 1989, 28(4), L528.
12. Stutius, W., J. Cryst. Growth, 1982, 59, 1.
13. Ohki, A., Shibata, N. and Zambutsu, S., Jpn. J. Appl. Phys., 1988, 27, L909.
14. Ohki, A., Shibata, N., Ando, K. and Katsui, A., J. Cryst. Growth, 1988, 93, 692.
15. Yoshikawa, A., Muto, S., Yamaga, S. and Kasai, H., J. Cryst. Growth, 1988, 86, 279.
16. Yoshikawa, Y., Muto, S., Yamaga, S. and Kasai, H., Jpn. J. Appl. Phys., 1988, 27, 992.
17. Suemune, I., Yamada, K., Masato, H., Kando, T., Kan, Y. and Yamanishi, M., Jpn. J. Appl. Phys., 1988, 27, L2195.
18. Taike, A., Migata, M. and Yamamoto, H., Appl. Phys. Lett., 1990, 56, 1989.
19. Migita, M., Taike, A. and Yamamoto, H., J. Appl. Phys., 1990, 68, 880.
20. Frankland, E., Proc. Roy. Soc., 1856-57, 8, 502.
21. Lappert, M. F., Power, P. P., Sanger, A. R. and Srivastava, R. C., Metal and Metalloid Amides, Ellis Horwood, Chichester, 1980, 545-566.
22. Reese, W. S. Jr., Green, D. M., Anderson, T. J. and Bretschneider, E. I., MRS Symp. Proc., 1992, 242, 281.
23. Reese, W. S. Jr., Green, D. M., Anderson, T. J., Bretschneider, E., Pathangey, B., Park, C. and Kim, J., J. Electronic Material, 1992, 21, 361.
24. Reese, W. S. Jr. and Just, O., MRS Symp. Proc., 1994, 334, 219.
25. Reese, W. S. Jr., Green, D. M., Hesse, W., Anderson, T. J. and Pathangey, B., MRS Symp. Proc., 1993, 282, 63.
26. Reese, W. S. Jr., Green, D. M., Anderson, T. J. and Bretschneider, E., MRS Symp. Proc., 1992, 242, 281.
27. Bell, N. A., Shearer, H. M. M. and Spencer, C. B., Acta Cryst., 1983, C39, 1182.
28. Haaland, A., Hedberg, K. and Power, P. P., Inorg. Chem., 1984, 23, 1972.
29. Reese, W. S. Jr., Green, D. M. and Hesse, W., Polyhedron, 1992, 11, 1697.
30. Moorhouse, S. and Wilkinson, G., J. Chem. Soc., Dalton Trans., 1974, 2187.
31. Coates, G. E., Roberts, P. D. and Downs, A. J., J. Chem. Soc., A1967, 1085.
32. Abrahams, M. H., J. Chem. Soc., 1960, 4130.
33. Noltes, J. G., Rec. Trav. Chem., 1965, 84, 126.
34. Coates, G. E. and Ridley, D., J. Chem. Soc., 1965, 1870.
35. Cuvigny, T. and Normant, M. H., Comptes rendus, 1969, 268C, 835.