Modeling of plume dynamics in laser ablation processes for thin film deposition of materials

Physics of Plasmas

Volumn 3, Issue 5, 1996, Pages 2203-2209

  Leboeuf, J N ^a   Chen, K R ^a   Donato, J M ^a   Geohegan, D B ^a   Liu, C L ^a   Puretzky, A A ^a   Wood, R F ^a  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

ABLATION; DEPOSITION; LASER RADIATION; LASER PRODUCED PLASMA; PLASMA SIMULATION; THIN FILMS; TRANSPORT THEORY

Indexed keywords

EID: 0001739033     PISSN: 1070664X     EISSN: 10897674     Source Type: Journal    
DOI: 10.1063/1.871676     Document Type: Article

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