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Volumn 88, Issue 7, 2000, Pages 4401-4403
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Elastic deformation of wafer surfaces in bonding
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0001719453
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1289233 Document Type: Article |
Times cited : (5)
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References (5)
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