An impedance based non-contact feedback control system for scanning probe microscopes

Review of Scientific Instruments

Volumn 67, Issue 4, 1996, Pages 1468-1471

  Lee, Mark ^a   McDaniel, E B ^a   Hsu, J W P ^a  

^a University of Virginia   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001690697     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1146875     Document Type: Article

References (10)

1. J. W. P. Hsu, M. Lee, and B. S. Deaver, Rev. Sci. Instrum. 66, 3177 (1995).
2. M. Honda, Hewlett-Packard Publication No. 59503000 (1989).
3. We usually operate with lock-in time constant of 80 to 300 μs.
4. THe magnitude of this signal will depend on the relative mass and stiffness of the dither piezo and the tip. The numbers given are for tapered fiberoptic tips and the dither piezo described.
5. E. B. McDaniel and J. W. P. Hsu (unpublished).
6. E. Betzig, P. L. Finn, and J. S. Weiner, Appl. Phys. Lett. 60, 2484 (1992); F. F. Froehlich and T. D. Milster, ibid. 65, 2254 (1994).
7. E. Betzig, P. L. Finn, and J. S. Weiner, Appl. Phys. Lett. 60, 2484 (1992); F. F. Froehlich and T. D. Milster, ibid. 65, 2254 (1994).
8. We have used the following digital dual-phase lock-ins: Stanford Research Systems SR 850 and SR 830, EG&G Instruments 5302 and 7260.
9. Analog Devices Special Linear Reference Manual (Analog Devices, Norwood, MA, 1992), pp. 4-23 to 4-30.
10. 2) conversion circuits, both of which worked well with our feedback system.